This on-line glossary written by Dr. Chris A. Mack, provides a list of common words or phrases and their corresponding definitions as used in the field of semiconductor microlithography. This will be of particular benefit to people who are new to, or outside of, the field of lithography. The definitions assume that the reader has a general technical background and a basic familiarity with the semiconductor industry.
The PROLITH Technical Papers document over two decades of leading-edge research and development in lithography process optimization, using the PROLITH product line:
- PROLITH Lithography Process Optimization Tool
- ProBEAM E-Beam Lithography Optimization Tool
- ProDATA Advanced CD Analysis
- SEM Image Analysis Module (SIAM)
