MEMS Projects at RIT
Bulk Micromachined Pressure Sensor
As part of the project in MEMS fabrication course at RIT, students were to design a bulk micromachined piezoresistive pressure sensor. Arrays of pressure sensors with various dimensions as to yield different characteristics were designed and fabricated. The micrograph shown below illustrates a thin silicon diaphragm formed by a directional crystalline etch in KOH at an elevated temperature. As pressure is applied, the thin diaphragm will deflect, inducing stress and altering the electrical characteristic of a polysilicon resistor build on top of it. This course is developed by Dr. Lynn Fuller. For more information on this project click here.
MEMS Gas Flow Sensors
This course is developed by Dr. Lynn Fuller. For more information on this project click here.